型号：APT 6000
1. 机构部分：
X、Y、Z、θ轴(精度详见规格)
Chuck table（非导电盘&导电盘，共2块）
XYZ 调整座 2 座
Edge Sensor 2 座
彩色CCD 1组，1倍镜头，供扫描定位用、供探针定位、外观检视用
掀开式遮光罩
电控箱
分光卡：350nm-1050nm
选配部分：
清针模块 (毛刷 & 贴片 & 吹气)
è 毛刷及贴片为耗材，依客户的使用状况决定更换次数
ESD 模块：HBM/MM ± 4 KV
è Relay 寿命保证：6个月或2亿次(以先到为主)
2. 测试机部份
电源供应器：SF
Tester基本架构图如下：APT6000
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3. IPC 部 分
中央处理器：双核心 CPU G3420 3.2 GHz
存储器：4G
硬盘：500G
17”LCD或以上荧幕、光学鼠标、键盘
作业系统 : Win 7
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Item |
DeSCRJPTion |
Specification |
|
Working Area |
For 2~7.8 inches |
198mm |
|
Chuck |
Planariztion |
±0.01 mm |
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X axis |
Max. travel stroke |
200 mm |
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Resolution |
0.5 μm |
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Accuracy |
< 10 μm over 100 mm |
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Y axis |
Max. travel stroke |
300 mm |
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Resolution |
0.5 μm |
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Accuracy |
< 10 μm over 100 mm |
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Z axis |
Max. travel stroke |
8 mm |
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Resolution |
1.2 μm |
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Accuracy |
< 5 μm over 30 mm |
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θ axis |
Rotation range |
± 30° |
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Resolution |
0.0018° |
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Accuracy |
< 10 μm over 160 mm |
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Machine Vision |
Camera |
CCD |
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Illumination |
Remote control |
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Focus |
Manual adjustment |
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Alignment |
Auto alignment |
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CCD Resolution |
1280*960 pixels |
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Magnification of Lens |
1x |
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Field of View |
6.4mm × 4.8 mm |
l Test Spec.
l Source Meter : SF
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Item |
Unit |
Specification |
|
Machine Size W × D × H |
mm |
930x900x1670 |
|
Machine Weight |
Kg |
600 |
|
Power source |
V |
110 |
|
Power current |
A |
13 |
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Air pressure |
Kgf/cm2 |
5 |
|
Air flow rate |
NL/min |
5 |
|
Air tube Diameter |
mm |
ψ10 |
|
Vacuum pressure |
mmHg |
-660 |
|
Vacuum flow rate |
NL/min |
40 |
|
Vacuum tube Diameter |
mm |
ψ6 |
898995850
